Accurate Analysis of Shallow Solar Wind Ion Implants by Sims Backside Depth Profiling
نویسندگان
چکیده
Introduction: The NASA mission “Genesis” collected solar wind (SW) for laboratory analysis [1]. SW can serve as a proxy for the Sun’s composition, and thus the average composition of the solar nebula [2], provided that fractionation processes during SW formation [e.g., 3] can be understood and quantitatively modeled. The Geneisis objective is to obtain elemental and isotopic abundances with precisions and accuracies better than available spacecraft data, which have uncertainties of up to several tens of percent [4]. SW ions travel with an average speed of 400km/s, (~1keV/amu) at 1 AU; thus, SW is implanted with a mean depth of ~40nm into exposed collectors. The highest energy SW ions (up to 1200km/s) penetrate up to ~600nm deep. Despite the purity of the collector materials, contamination of their surfaces is signficant: a natural oxide layer, a molecular film deposited in space [5], and particles deposited during the hard landing are all present. Here, we present a technique that is capable of analyzing nearly complete depth distributions of many elements in the SW even in the presence of high levels of surface contamination: backside depth profiling by secondary ion mass spectrometry (SIMS), which we have successfully applied to the analysis of bulk SW with fluence as low as 210 atoms/cm and also of all three SW regimes for some more abundant elements. A low impact energy primary ion beam and oxygen flooding are used to minimize ion beam mixing of surface contamination and transient effects on SIMS ion yields. We discuss sample preparation, analytical conditions, standardization, and data reduction as well as potential systematic errors.
منابع مشابه
اندازهگیری نمای فراوانی فسفر کشت شده فراسطحی در سیلیسیوم
We have initiated a study to extract concentration profiles of ultra shallow phosphorous implants in silicon complementing published work on ultra shallow boron implant profiles. There is an ever-increasing interest in the production of p-n junctions in silicon to create the new generations of ultra large scale integrated (ULSI) devices. Such junctions can be formed by implantation do pants (...
متن کاملCarbon, Nitrogen, and Oxygen Abundances in the Bulk Solar Wind and Calibration of Absolute Abundances
Introduction: Carbon, nitrogen and oxygen abundances measured in the solar wind (SW) are an important constraint for the abundance of these elements in the Sun. Photospheric spectroscopy measurements have large uncertainties and C, N, and O abundances have been revised downward over the last two decades [1, 2]. The thus reduced solar metallicity lead to a stillunresolved disagreement with solar...
متن کاملGenesis Sodium and Potassium Bulk Solar Wind Fluences
Introduction: We present preliminary measurements of solar wind (SW) Na and K abundances measured by secondary ion mass spectrometry (SIMS). Genesis B/C (bulk SW) array silicon (Si) and diamondlike-carbon (DlC) on Si (DoS) collectors were analyzed using backside depth profiling (BDP). This is the first reported use of SIMS for BDP of thinned Genesis DoS collectors. Background: It is thought tha...
متن کاملUltra Shallow Depth Profiling by Secondary Ion Mass Spectrometry Techniques
Ultra shallow dopant profiles are one of the major challenges for ULSI silicon metrology. Following the ITRS 2002, the 90nm technology node will appear in 2004 along with the maximum drain extension in the range of 15-25 nm for both P-MOS and N-MOS devices. In this frame, a very abrupt junction with a decay length of 4 nm/decade is mandatory. A depth resolution better than 0.7 nm in profiling s...
متن کاملEvaluation of Nitrogen Diffusion in Plasma Nitrided Iron by Various
Diffusion of nitrogen in plasma nitrided iron and structural evolution during the nitriding process were evaluated by several characterization techniques including optical microscopy (OM), microhardness depth profiling (HDP), scanning electron microscopy (SEM), x-ray diffraction (XRD), glow discharge optical emission spectroscopy (GDOES), and secondary ion mass spectroscopy (SIMS). Plasma ni...
متن کامل